To provide an organic electroluminescence element having an electron transporting layer formed from an inorganic substance on a luminescent layer having a heat resisting temperature not more than 100°C.

A luminescent layer 4 having a heat resisting temperature not more than 100°C is formed on a positive hole transporting layer on a transparent electrode of a transparent board 1, and an electron transporting layer 5 formed from an inorganic substance is formed on the luminescent layer 4 by means of spattering. In addition, SiNx, SiNx:H, p-type amorphous silicon is used for the positive hole transporting layer 3, and SiNx, SiNx:H, n-type amorphous silicon is used as the electron transporting layer 5. While sputtering is used to form the films of the positive hole transporting layer 3 and the electron transporting layer 5 and resistance heating is used to deposit the luminescent layer 4, a means to form the films by performing those processes continuously while maintaining a vacuum condition is employed.