Title:
酸化物焼結体およびスパッタリングターゲット
Document Type and Number:
Japanese Patent JP7282766
Kind Code:
B2
Abstract:
An oxide sintered body according to one aspect of an embodiment includes indium, gallium, and zinc. The oxide sintered body includes a homologous structured compound represented by InGaZnO4 or InGaZn2O5, and a spinel structured compound represented by ZnGa2O4, and has a flexural strength of 180 MPa or more.
Inventors:
Ryo Shiranita
Application Number:
JP2020525347A
Publication Date:
May 29, 2023
Filing Date:
May 13, 2019
Export Citation:
Assignee:
Mitsui Mining & Smelting Co., Ltd.
International Classes:
C04B35/453; C04B35/01; C23C14/34
Domestic Patent References:
| JP2010238770A | ||||
| JP2015157755A | ||||
| JP2011003856A | ||||
| JP2009275272A | ||||
| JP2008163441A | ||||
| JP2014105124A | ||||
| JP2013239531A | ||||
| JP2013183012A | ||||
| JP2014055349A | ||||
| JP2011238968A |
Foreign References:
| WO2014021334A1 | ||||
| WO2015068564A1 |
Attorney, Agent or Firm:
Sakai International Patent Office
Previous Patent: Paper containing aramid pulp and friction paper made therefrom
Next Patent: white light emitting device
Next Patent: white light emitting device