Title:
【発明の名称】固体撮像装置の製造方法
Document Type and Number:
Japanese Patent JP2677786
Kind Code:
B2
Abstract:
PURPOSE:To obtain a solid-state image pickup device which excludes an irregularity in drying and the separation of a color filter by forming a layer to be dyed on a transparent flattened film after an oxygen plasma treatment, and dyeing it in specific colors and forming color filters. CONSTITUTION:Light-workable resin is applied by spin coating over the entire surface of a solid-state image pickup element 1 so as to include bonding pad 6 and 7, thereby forming the transparent flattened film 4 having a uniform surface. The transparent flattened film 4 on the bonding pads 6 and 7 is removed and the oxygen plasma treatment is carried; and the layer 8 to be dyed is formed on the transparent flattened film 11 after the oxygen plasma treatment and dyed in the specific colors to form the color filters 5R, 5B, and 5G. Consequently, the transparent flattened film 4 is made into a hydrophilic transparent flattened film 11 to preclude the transparent flattened film 11 from being hydrophobic, thereby enabling uniform drying and also increasing the adhesive strength to the dyed layer 8.
Inventors:
Tetsuya Okochi
Yasuhiko Naito
Toshiro Kurusu
Imayoshi Morio
Yoshimura Matsumura
Yasuhiko Naito
Toshiro Kurusu
Imayoshi Morio
Yoshimura Matsumura
Application Number:
JP16277386A
Publication Date:
November 17, 1997
Filing Date:
July 10, 1986
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L27/14; G02B5/20; H04N9/07; (IPC1-7): G02B5/20; H01L27/14; H04N9/07
Domestic Patent References:
| JP59192208A | ||||
| JP6173103A | ||||
| JP6143701A | ||||
| JP56132876U |
Attorney, Agent or Firm:
Hidekuma Matsukuma