Title:
Pattern formation method
Document Type and Number:
Japanese Patent JP6126807
Kind Code:
B2
Inventors:
Masaki Saki
Ken Miyagi
Kenichiro Miyashita
Ken Miyagi
Kenichiro Miyashita
Application Number:
JP2012186759A
Publication Date:
May 10, 2017
Filing Date:
August 27, 2012
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
H01L21/027; B29C59/00; B82B3/00; B82Y40/00; G03F7/038; G03F7/039; G03F7/40
Domestic Patent References:
| JP2013228492A | ||||
| JP2008036491A | ||||
| JP2011018778A | ||||
| JP2012134353A | ||||
| JP201251060A | ||||
| JP20107070A | ||||
| JP201056257A | ||||
| JP2001151834A | ||||
| JP2013209515A | ||||
| JP2014528015A | ||||
| JP2014034626A | ||||
| JP2014033051A |
Foreign References:
| WO2012046770A1 |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi
Masatake Shiga
Suzuki Mitsuyoshi
Mitsunaga Igarashi