Title:
パターン検査装置及び輪郭線同士のアライメント量取得方法
Document Type and Number:
Japanese Patent JP7409988
Kind Code:
B2
Abstract:
A pattern inspection apparatus includes an actual outline image generation circuit to generate an actual outline image of a predetermined region defined by a function, where the gray scale value of each pixel in the predetermined region including plural actual image outline positions on an actual image outline of a figure pattern in an inspection image is dependent on a distance from the center of a pixel concerned to the closest actual image outline position in the plural actual image outline positions, and a reference outline image generation circuit to generate a reference outline image of the predetermined region defined by the function, where a gray scale value of each pixel in the predetermined region is dependent on a distance from the center of a pixel concerned to the closest reference outline position in plural reference outline positions on a reference outline to be compared with the actual image outline.
Inventors:
Mako Sugihara
Application Number:
JP2020128134A
Publication Date:
January 09, 2024
Filing Date:
July 29, 2020
Export Citation:
Assignee:
New Flare Technology Co., Ltd.
International Classes:
G01N23/2251; G01N21/956; G06T7/00
Domestic Patent References:
| JP201939808A | ||||
| JP2008151568A | ||||
| JP2004163420A | ||||
| JP2001175857A | ||||
| JP11201908A |
Foreign References:
| US20190206024 | ||||
| US20160292840 | ||||
| US6141038 |
Attorney, Agent or Firm:
Tetsuma Ikegami
Akira Sudo
Masahiro Koshita
Akira Sudo
Masahiro Koshita
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