Title:
Pattern irradiation equipment and a system
Document Type and Number:
Japanese Patent JP6075352
Kind Code:
B2
Inventors:
Jun Kishiwada
Shin Inamoto
Naoki Kikuchi
Tatsuya Takahashi
Kazuhiro Fujita
Toshiharu Murai
Takehiro Nishimori
Takahiro Kato
Shin Inamoto
Naoki Kikuchi
Tatsuya Takahashi
Kazuhiro Fujita
Toshiharu Murai
Takehiro Nishimori
Takahiro Kato
Application Number:
JP2014212751A
Publication Date:
February 08, 2017
Filing Date:
October 17, 2014
Export Citation:
Assignee:
株式会社リコー
International Classes:
G01B11/25
Domestic Patent References:
| JP2001264033A | ||||
| JP3029806A |
Attorney, Agent or Firm:
Hiroaki Sakai