Title:
PELLET BONDING DEVICE
Document Type and Number:
Japanese Patent JPS5458356
Kind Code:
A
Inventors:
KUSHIMA YOSHIMITSU
Application Number:
JP12447377A
Publication Date:
May 11, 1979
Filing Date:
October 19, 1977
Export Citation:
Assignee:
SHINKAWA SEISAKUSHO KK
International Classes:
H01L21/67; H01L21/52; H01L21/58; (IPC1-7): H01L21/58
Domestic Patent References:
| JPS5011652A | 1975-02-06 |