Title:
PELLET MOUNTING METHOD
Document Type and Number:
Japanese Patent JPS6245133
Kind Code:
A
Abstract:
PURPOSE: To improve the wetting extension of bonding, and to mount a pellet properly by applying ultrasonic vibrations on the mounting of the pellet.
CONSTITUTION: A pellet 6 is sucked under a vacuum by a collet 5, and the pellet 6 is pushed against an adhesive layer 4 by the collet 5 and the pellet 6 is mounted. Vertical ultrasonic vibrations are applied or lateral ultrasions are applied to a tab 1 or ultrasonic vibrations are applied to the collet 5 at that time, and ultrasonic energy is transmitted over adhesives 3. Consequently, the wetting extension of adhesives 3 is improved by ultrasonic energy. Accordingly, the pellet is mounted properly.
Inventors:
ICHITANI MASAHIRO
Application Number:
JP18412685A
Publication Date:
February 27, 1987
Filing Date:
August 23, 1985
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/52; H01L21/58; (IPC1-7): H01L21/58
Attorney, Agent or Firm:
Katsuo Ogawa