PURPOSE: To facilitate the transfer of patterns of the width broader than the width of dark lines generated by the interference of the transmitted light of a transmission region and a shifter region.

CONSTITUTION: The chromium-less phase shift mask having the transmission region 4 and shifter region 5 where the phases between the transmitted light beams shift by a half wavelength is constituted by providing a phase transition region 6 where the phase of the transmitted light changes monotonously and continuously between the transmission region 4 and the shifter region 5. The transmission region 4 and the shifter region 5 are formed as the projecting part region and recessed part region on the surface of the phase shift mask. The phase transition region 6 is so constituted that its surface is formed as a region consisting of slopes connecting the surfaces of the two regionss; the projecting part region and the recessed part region.