PURPOSE: To obtain a photographing stripe filter of a simple structure in a short process of production, by using an amorphous hydrogenated silicon nitride film to a yellow filter and therefore eliminating an intermediate layer.
CONSTITUTION: An amorphous hydrogenated silicon nitride film 22 is stacked on a glass substrate 21 in an atmosphere of a mixture gas of 1.80×10-3 Torr hydrogen pressure, 3.0×10-4 Torr nitrogen pressure and 1.34×10-3 Torr argon pressure respectively. A stripe pattern having a desired pitch is formed with a resist 23. The area where no resist is coated is etched directly with use of the carbon tetrafluoride gas and by a reactive sputtering etching process. A cyanogen filter 24 uses a multi-layer structure containing TiO2 and SiO2 and stacked on the film 22 by an electronic beam vapor deposition process to obtain a stripe filter in the same process as that of the yellow filter.
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