Title:
フォトマスク
Document Type and Number:
Japanese Patent JP4491682
Kind Code:
B2
Inventors:
Yukio Taniguchi
Application Number:
JP2004208967A
Publication Date:
June 30, 2010
Filing Date:
July 15, 2004
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G03F1/26; G03F1/34; G03F1/68; H01L21/027
Domestic Patent References:
| JP2002116528A | ||||
| JP2003315552A | ||||
| JP2096103A | ||||
| JP2001272764A | ||||
| JP2005077966A | ||||
| JP2000112116A |
Foreign References:
| WO2005050317A1 | ||||
| WO2002044817A2 |
Attorney, Agent or Firm:
Akihiko Yamashita
Kishimoto Tatsuto
Kishimoto Tatsuto