Title:
PHOTOOETCHING METHOD
Document Type and Number:
Japanese Patent JPS5258603
Kind Code:
A
Inventors:
HIROBE YOSHIMICHI
IWAMATSU SEIICHI
IWAMATSU SEIICHI
Application Number:
JP13410775A
Publication Date:
May 14, 1977
Filing Date:
November 10, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G03F1/00; G03F1/76; H01L21/00; H01L21/027; (IPC1-7): G03F7/02; H01L21/00
Domestic Patent References:
| JPS475129A | ||||
| JP35016614A |