Title:
感光性接着剤組成物、並びにこれを用いて得られる接着フィルム、接着シート、接着剤層付半導体ウェハ、半導体装置及び電子部品
Document Type and Number:
Japanese Patent JP5186706
Kind Code:
B2
Abstract:
A photosensitive adhesive composition comprising: (A) a polyimide having a carboxyl group as a side chain, whereof the acid value is 80 to 180 mg/KOH; (B) a photo-polymerizable compound; and (C) a photopolymerization initiator.
Inventors:
Takashi Kawamori
Takashi Masuko
Katogi Shigeki
Masaaki Yasuda
Takashi Masuko
Katogi Shigeki
Masaaki Yasuda
Application Number:
JP2009168976A
Publication Date:
April 24, 2013
Filing Date:
July 17, 2009
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
C09J179/08; C09J7/00; C09J163/00; H01L21/52; H01L23/29; H01L23/31
Domestic Patent References:
| JP2007004569A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Junichiro Sakamaki
Hideki Okita
Hiroto Kido
Masato Ikeda
Yoshinori Shimizu
Junichiro Sakamaki
Hideki Okita
Hiroto Kido
Masato Ikeda
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