Title:
PHOTOSENSITIVE CERAMIC COMPOSITION AND CERAMIC SUBSTRATE
Document Type and Number:
Japanese Patent JP2003055036
Kind Code:
A
Abstract:
To provide a photosensitive ceramic composition which can form via holes with a high aspect ratio and high definition by using a photolithographic process and which has a low dielectric constant after firing.
The photosensitive ceramic composition contains at least inorganic particles having a hollow structure and contains a photosensitive organic component as an essential component.
Inventors:
YAMAHO TOMOYA
MASAKI YOSHIKI
MASAKI YOSHIKI
Application Number:
JP2001252542A
Publication Date:
February 26, 2003
Filing Date:
August 23, 2001
Export Citation:
Assignee:
TORAY INDUSTRIES
International Classes:
G03F7/004; C04B35/14; C04B35/16; H05K1/03; H05K3/46; (IPC1-7): C04B35/14; C04B35/16; G03F7/004; H05K1/03; H05K3/46
Domestic Patent References:
| JPH05283272A | 1993-10-29 | |||
| JPH05170517A | 1993-07-09 | |||
| JPH05283272A | 1993-10-29 | |||
| JPH05170517A | 1993-07-09 |