Title:
永久膜形成用感光性樹脂組成物、硬化膜、電子装置、硬化膜の製造方法および電子装置の製造方法
Document Type and Number:
Japanese Patent JP6996637
Kind Code:
B2
Abstract:
The permanent film-forming photosensitive resin composition according to one aspect of the present invention contains an alkali-soluble resin (A), a photosensitizer (B), and a surfactant (C), wherein the surfactant (C) contains an organic modified dimethylsiloxane represented by formula (1) (in formula (1), X represents a polyether group, a polyester group, or an aralkyl group, and m and n each represent an integer of 1-100).
Inventors:
Taro Kitahata
Application Number:
JP2020546000A
Publication Date:
January 17, 2022
Filing Date:
September 09, 2019
Export Citation:
Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
G03F7/004; G03F7/023; G03F7/075; G03F7/20
Domestic Patent References:
| JP2010243748A | ||||
| JP2015168739A | ||||
| JP2009042422A | ||||
| JP2013100480A |
Foreign References:
| US20140113230 |
Attorney, Agent or Firm:
Shinji Hayami
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