Title:
感光性樹脂組成物
Document Type and Number:
Japanese Patent JPWO2016163540
Kind Code:
A1
Abstract:
感光性樹脂組成物は、アルカリ可溶性高分子、エチレン性不飽和結合を有する化合物；及び光重合開始剤を含み、そして該感光性樹脂組成物から成る感光性樹脂層を基板表面上に形成し、露光及び現像を行って得られたレジストパターンを耐薬液性評価のための薬液で処理した後に、硬化レジストラインの最小ライン幅が１７μｍ以下である。
More Like This:
Inventors:
Kunimatsu Shinichi
Takayuki Matsuda
Yuri Yamada
Yamato Tsutsui
Fujiwara Akira
Takayuki Matsuda
Yuri Yamada
Yamato Tsutsui
Fujiwara Akira
Application Number:
JP2017511104A
Publication Date:
November 02, 2017
Filing Date:
April 08, 2016
Export Citation:
Assignee:
ASAHI KASEI KABUSHIKI KAISHA
International Classes:
G03F7/027; C08F2/44; C08F2/46; G03F7/029; G03F7/20; G03F7/40; H05K3/06; H05K3/18
Domestic Patent References:
| JP2008094803A | 2008-04-24 | |||
| JP2007133349A | 2007-05-31 | |||
| JP2000347400A | 2000-12-15 | |||
| JP2006145844A | 2006-06-08 | |||
| JP2011215366A | 2011-10-27 | |||
| JP2014126653A | 2014-07-07 | |||
| JP2014041301A | 2014-03-06 | |||
| JP2013195681A | 2013-09-30 | |||
| JP2015007766A | 2015-01-15 | |||
| JP2014002285A | 2014-01-09 | |||
| JP2010128328A | 2010-06-10 | |||
| JP2012088457A | 2012-05-10 | |||
| JP2011180478A | 2011-09-15 | |||
| JP2012215843A | 2012-11-08 | |||
| JP2013200431A | 2013-10-03 | |||
| JP2014142582A | 2014-08-07 |
Foreign References:
| WO2009078380A1 | 2009-06-25 | |||
| WO2006011548A1 | 2006-02-02 | |||
| WO2003042758A1 | 2003-05-22 | |||
| KR20120002864A | 2012-01-09 | |||
| WO2015178462A1 | 2015-11-26 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Kazuhiro Nakamura
Toko Saito
Shunsuke Mima
Takashi Ishida
Tetsuji Koga
Kazuhiro Nakamura
Toko Saito
Shunsuke Mima