Title:
物理量センサ
Document Type and Number:
Japanese Patent JP6527801
Kind Code:
B2
Abstract:
To provide a physical quantity sensor having excellent reliability by reducing the influence of a force applied from the outside. Disclosed is a physical quantity sensor, which has a weight or a movable electrode formed on a device substrate, and an outer peripheral section that is disposed to surround the weight or the movable electrode, said weight or movable electrode being displaceable in the rotation direction in a plane. When the weight or the movable electrode is displaced in the rotation direction in the plane, the physical quantity sensor is provided with a rotation space at the outer peripheral section of an end portion of the weight or the movable electrode, said end portion being in the direction viewed from the center position of the weight or the movable electrode.
Inventors:
Masatoshi Kanamaru
Daisuke Maeda
Masahide Hayashi
Akihiro Okamoto
Masashi Yura
Daisuke Maeda
Masahide Hayashi
Akihiro Okamoto
Masashi Yura
Application Number:
JP2015192510A
Publication Date:
June 05, 2019
Filing Date:
September 30, 2015
Export Citation:
Assignee:
Hitachi Automotive Systems, Ltd.
International Classes:
G01P15/125; B81B3/00; G01P15/08; H01L29/84
Domestic Patent References:
| JP2008164471A | ||||
| JP201336829A | ||||
| JP2012229989A | ||||
| JP2010210420A |
Foreign References:
| US20140167189 | ||||
| DE102012104601A1 |
Attorney, Agent or Firm:
Yuji Toda