Title:
圧電アクチュエータおよびその駆動回路
Document Type and Number:
Japanese Patent JP4144356
Kind Code:
B2
Abstract:
A piezoactuator has a diaphragm, and the diaphragm has flat piezoelectric elements that oscillate in a longitudinal oscillation mode and a sinusoidal oscillation mode. A first electrode for detecting oscillation in the longitudinal oscillation mode, and a second electrode for detecting the amplitude of oscillation in the sinusoidal oscillation mode, are disposed on the surface of the diaphragm. When the piezoactuator is driven with a drive signal, the phase difference of a first detection signal output from the first electrode and a second detection signal output from the second electrode is detected. The frequency at which the detected phase difference becomes the maximum phase difference is then obtained, and a drive signal of a matching frequency is applied to the piezoelectric elements.
Inventors:
Hidehiro Akabane
Akihiro Sawada
Makoto Furuhata
Akihiro Sawada
Makoto Furuhata
Application Number:
JP2002576088A
Publication Date:
September 03, 2008
Filing Date:
March 26, 2002
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H02N2/00; G04C3/12; G06K19/07; H01L41/04; H01L41/09
Domestic Patent References:
| JP10052072A | ||||
| JP2000295876A | ||||
| JP2000078867A | ||||
| JP9308274A | ||||
| JP6014565A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Fujitsuna Hideyoshi
Osamu Suzawa
Fujitsuna Hideyoshi
Osamu Suzawa