Title:
Piezoelectric control acceleration sensor
Document Type and Number:
Japanese Patent JP6232957
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric acceleration sensor capable of detecting acceleration applied in a Z-axis direction and achieving downsizing.SOLUTION: There is provided a piezoelectric acceleration sensor 1 that detects acceleration using a variation in resonance frequency when the acceleration is applied. In the piezoelectric acceleration sensor, a recess 2a is provided in a substrate 2 and a piezoelectric vibration element 3 having a piezoelectric film 5 is disposed at a gap formed by the recess 2a. The piezoelectric vibration element 3 is fixed to a support surface of the substrate 2. The piezoelectric vibration element 3 has the piezoelectric film, and first and second electrodes 6 and 7 provided to be in contact with the piezoelectric film. Furthermore, a neutral plane of stress caused by the acceleration applied to the piezoelectric vibration element 3 is positioned within the gap.
Inventors:
Yamamoto Kansho
Hitoshi Sakaguchi
Hitoshi Sakaguchi
Application Number:
JP2013237894A
Publication Date:
November 22, 2017
Filing Date:
November 18, 2013
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
G01P15/10; H01L41/047; H01L41/113
Domestic Patent References:
| JP2013152189A | ||||
| JP5446187B2 | ||||
| JP3972790B2 | ||||
| JP2012122741A |
Attorney, Agent or Firm:
Patent business corporation Miya saki, table of contents patent office
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