PIEZOELECTRIC DEVICE AIR-TIGHTLY SEALED AND AIR-TIGHT SEALING PACKAGE

Title:

PIEZOELECTRIC DEVICE AIR-TIGHTLY SEALED AND AIR-TIGHT SEALING PACKAGE

Document Type and Number:

Japanese Patent JPH06350376

Kind Code:

A

Abstract:

PURPOSE: To obtain a small sized piezoelectric device subject to air-tight sealing with high performance at low cost and the air-tight sealing package with excellent air-tightness without a secular change.

CONSTITUTION: A package is formed by a piezoelectric plate 101 having a desired vibrator characteristic in which electrodes 106, 107 are formed nearly to a middle part of two opposite faces. A cover piezoelectric plate 102 having a recessed part nearly in the middle and a bottom piezoelectric plate 103 are adhered directly (direct adhesion sections 104, 105). The electrodes 106, 107 are led out externally by throughholes 801, 802 formed to the cover piezoelectric plate 102 and the bottom piezoelectric plate 103 and with a conductive material packed in them via bumps 803, 804 made of a conductive material.

Inventors:

SATOU HIROKI
ISHIZAKI TOSHIO
SAKAGAMI TAKESHI
HASHIMOTO KOJI
YAMADA TORU
UENO TOMOKI

Application Number:

JP523294A

Publication Date:

December 22, 1994

Filing Date:

January 21, 1994

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD

International Classes:

H01C1/02; H01L23/08; H01L41/053; H03H3/007; H03H9/02; H03H9/05; H03H9/10; H03H9/13; H03H9/17; H03H9/25; H03H9/56; H05K5/06; (IPC1-7): H03H9/02; H01C1/02; H01L23/08; H03H3/007; H03H9/13; H03H9/17; H03H9/25; H03H9/56; H05K5/06

Attorney, Agent or Firm:

Masamichi Matsuda

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