Title:
圧電振動素子及びその製造方法
Document Type and Number:
Japanese Patent JP5672884
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric vibration element with excellent humidity resistance and a manufacturing method thereof.SOLUTION: A manufacturing method of a piezoelectric vibration element polarizes a piezoelectric body 10 by applying a voltage to an element body 15 via a pair of electrodes 11 and 12. After a polarization step, the manufacturing method vibrates the element body 15 by applying an AC voltage to the element body 15 via the pair of electrodes 11 and 12. After starting a vibration step, the manufacturing method forms protection films 16a and 16b on at least a part of the surface of the element body 15.
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Inventors:
中村 仁宗
中谷 宏
中谷 宏
Application Number:
JP2010207213A
Publication Date:
February 18, 2015
Filing Date:
September 15, 2010
Export Citation:
Assignee:
株式会社村田製作所
International Classes:
H01L41/083; H03H3/02; H01L41/09; H01L41/187; H01L41/22; H01L41/23; H01L41/257; H01L41/27; H01L41/338; H03H9/17
Attorney, Agent or Firm:
Miyazaki Chikara
Kazutoshi Nakayama
Kazutoshi Nakayama