Title:
PLASMA CLEANING EQUIPMENT FOR BOARD
Document Type and Number:
Japanese Patent JP3042325
Kind Code:
B2
Abstract:
PURPOSE: To provide a plasma cleaning equipment for board in which the circuit pattern on a board can be cleaned while protecting a chip.
CONSTITUTION: A board 1 mounting a chip 12 is set on a first electrode 15 provided on a guide part 11 and when a case 16 is closed, the chip 12 is covered by a cover body 24 disposed in the case 16. The air within the case 16 is then sucked through a first pipe 31 and a discharge gas is fed through a second pipe 32 before a high frequency high voltage is applied to the first electrode 15. Consequently, a plasma discharge takes place within the case 16 to produce ion particles which strike a circuit pattern formed on the surface of the board 13 to clean the circuit pattern. The chip 12 is covered by the cover body 24 and it is not attacked by the ion particles.
Inventors:
Hiroshi Haji
Application Number:
JP25189694A
Publication Date:
May 15, 2000
Filing Date:
October 18, 1994
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/302; H01L21/304; H01L21/3065; H01L21/60; (IPC1-7): H01L21/60
Domestic Patent References:
| JP6132343A | ||||
| JP4311044A |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)