Title:
PLASMA DEVICE
Document Type and Number:
Japanese Patent JPS58140997
Kind Code:
A
Inventors:
KAGEYAMA KATSUHIRO
Application Number:
JP2107282A
Publication Date:
August 20, 1983
Filing Date:
February 15, 1982
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H05H1/16; (IPC1-7): H05H1/16
Attorney, Agent or Firm:
Noriyuki Noriyuki