Title:
Plasma etching device
Document Type and Number:
Japanese Patent JP6220183
Kind Code:
B2
Inventors:
Junichi Arami
Application Number:
JP2013164114A
Publication Date:
October 25, 2017
Filing Date:
August 07, 2013
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/3065
Domestic Patent References:
| JP2006303309A | ||||
| JP2009253263A | ||||
| JP2008251744A | ||||
| JP2002151471A | ||||
| JP2002533949A | ||||
| JP10008269A |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi