Title:
Plasma evaporation device
Document Type and Number:
Japanese Patent JP5989601
Kind Code:
B2
Inventors:
Miyashita Dai
Application Number:
JP2013112949A
Publication Date:
September 07, 2016
Filing Date:
May 29, 2013
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
C23C14/32
Domestic Patent References:
| JP9256147A | ||||
| JP11012725A | ||||
| JP2000144390A | ||||
| JP5295526A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yasuki Yanagi
Yoshiki Kuroki
Yasuki Yanagi
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