Title:
プラズマ生成用アンテナ及びCVD装置
Document Type and Number:
Japanese Patent JP4564213
Kind Code:
B2
Inventors:
Noriaki Kimura
Application Number:
JP2001280285A
Publication Date:
October 20, 2010
Filing Date:
September 14, 2001
Export Citation:
Assignee:
Mitsui Shipbuilding Co., Ltd.
International Classes:
H01L21/31; H05H1/46; C23C16/509; H01L21/302; H01L21/3065
Domestic Patent References:
| JP10189293A | ||||
| JP2000355771A | ||||
| JP2000008170A | ||||
| JP2001126899A | ||||
| JP2001274101A |
Attorney, Agent or Firm:
Shinichi Ogawa
Takashi Noguchi
Kazuhiko Saishita
Takashi Noguchi
Kazuhiko Saishita