Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4267506
Kind Code:
B2
Inventors:
Toyoda and his group
Yasuhiro Inoguchi
Takebayashi
Tadashi Kontani
Nobuo Ishimaru
Yasuhiro Inoguchi
Takebayashi
Tadashi Kontani
Nobuo Ishimaru
Application Number:
JP2004127760A
Publication Date:
May 27, 2009
Filing Date:
April 23, 2004
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
H01L21/31; H05H1/46; C23C16/509; H01L21/02; H01L21/316
Domestic Patent References:
| JP9055372A | ||||
| JP5251391A | ||||
| JP8236426A |
Attorney, Agent or Firm:
Kajiwara Tatsuya