PURPOSE: To prevent the formation of a conductive bridge and to precisely and rapidly design a plasma-process waste gas purifying device by quantitatively expressing a relation between the pulse duration and the interelectrode distance and continuously impressing a high-voltage pulse between the electrodes closest to each other.
CONSTITUTION: A high-voltage pulse power source 1 for producing plasma, a wire-type discharge electrode 2 and a plate-type counter electrode 3 are provided to the device. A high-voltage pulse is continuously impressed between the electrode 2 and 3 to produce non-equilibrium plasma 4 between the electrodes 2 and 3. A waste gas 5 to be treated is passed between the electrodes 2 and 3 and converted to the form easy to collect harmful components or to the harmless form. In this case, the shortest distance d (cm) between the electrodes 2 and 3 and the high-voltage pulse duration Ton (sec) are limited to conform to Ton≤d/108.
ARAI HIROSHIGE
INOUE TETSUYA
YASUDA KENJI
