To provide a plasma sterilization device capable of supplying plasma into a sterilization chamber where an object to be sterilized is stored and discharging a gas inside the sterilization chamber, in which the sterilization processing of the object to be sterilized is ended, directly into the atmosphere.
The plasma sterilization device comprises: a pressure resistant container 12 provided with the sterilization chamber 10; a sterilizer supply means 14 for supplying a gaseous sterilizer into the sterilization chamber 10; a non-reactive gas supply means 16 for supplying a non-reactive gas into the sterilization chamber 10; a plasma generator 18 provided on the outside of the pressure resistant container 12 for generating the plasma to be supplied into the sterilization chamber under the atmospheric pressure; and a vacuum pump 20 for discharging the gas inside the sterilization chamber 10. A control part 62 for controlling the sterilizer supply means 14, the non-reactive gas supply means 16, the plasma generator 18 and the vacuum pump 20 is provided so that the plasma is supplied into the sterilization chamber 10 where primary sterilization is performed to the object to be sterilized by the gaseous sterilizer from the sterilizer supply means 14, secondary sterilization is performed to the object to be sterilized and the gaseous sterilizer remaining inside the sterilization chamber 10 is made harmless. Thus, the gas inside the sterilization chamber, in which the sterilization processing of the object is ended, can directly be discharged into the atmosphere to eliminate the need of an exhaust gas decomposer required in a conventional plasma sterilization device, thereby simlifying the structure or the like of the plasma sterilization device and also its maintenance or the like.
TAKANO MASAKI
WAKABAYASHI MAMORU
SAWADA KOJI
MATSUSHITA ELECTRIC WORKS LTD
| JPH1099415A | 1998-04-21 | |||
| JP2001145689A | 2001-05-29 |
Horimai Kazuharu