To provide a method for manufacturing particles containing metal oxides, nanoparticles in particular, which are specifically nano-size particles containing titanium dioxide.

The process for synthesizing nano-size metal oxide particles in a plasma reactor comprises a process (a) where one or a plurality of reactant flows containing an oxidizing agent and a halogenated metal, a halogenated silicon, and a coarse tail controlling agent selected from a group comprising halogenated compounds of phosphorus, germanium, boron, tin, niobium, chromium, silver, gold, palladium, aluminum, and their mixtures are supplied simultaneously and a process (b) where the reactant flows and the oxidizing agent are brought into contact with plasma having a sufficient temperature to form metal oxide-containing nanoparticles having an average particle diameter of <100 nm and containing a small amount of particles having a diameter of >200 nm.