POLISHING DEVICE FOR THIN PLATE LIKE MEMBER

Title:

POLISHING DEVICE FOR THIN PLATE LIKE MEMBER

Document Type and Number:

Japanese Patent JPH04210369

Kind Code:

A

Abstract:

PURPOSE: To prevent the edge roll-over and chip of a thin plate like member by polishing a surface plate with its reciprocating in about orthogonal direction with the motion direction of the surface plate in the center of the thin plate like member.

CONSTITUTION: In the case of the polishing of a thin plate like member (work) 4, it is rotated by the rotation of a head 12, on the other hand a surface plate 13 executes a backward motion in about orthogonal direction with the motion direction at the center of the thin plate like member 4 together with rotation or reciprocating motion. Consequently, the polishing effect is not deviated by each part of the thin plate like member 4, the whole face of the thin plate like member 4 is uniformly polished.

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Inventors:

KAMITARI KATSUAKI
ARAKI TAKASHI
OKUBO KAZUYA

Application Number:

JP33859290A

Publication Date:

July 31, 1992

Filing Date:

November 30, 1990

Export Citation:

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Assignee:

TOSHIBA CERAMICS CO

International Classes:

B24B37/00; B24B37/07; B24B37/10; H01L21/304; (IPC1-7): B24B37/00; B24B37/04; H01L21/304

Attorney, Agent or Firm:

Shigeru Kinoshita (1 person outside)

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