Title:
微小部品の研磨装置及び同研磨方法
Document Type and Number:
Japanese Patent JP4868856
Kind Code:
B2
Inventors:
Tomokatsu Kojima
Application Number:
JP2006005383A
Publication Date:
February 01, 2012
Filing Date:
January 12, 2006
Export Citation:
Assignee:
Hitachi Computer Equipment Co., Ltd.
International Classes:
B24B37/30; B24B37/04
Domestic Patent References:
| JP2005007571A | ||||
| JP2004011789A | ||||
| JP6335781A | ||||
| JP2004136441A | ||||
| JP2005088145A | ||||
| JP2003063832A |
Attorney, Agent or Firm:
Minoru Hayashi
Patent business corporation Protech
Hitoshi Shinbo
Patent business corporation Protech
Hitoshi Shinbo