Title:
研磨液および研磨方法
Document Type and Number:
Japanese Patent JP5164541
Kind Code:
B2
Inventors:
Masaru Yoshikawa
Tetsuya Uemura
Tetsuya Uemura
Application Number:
JP2007308841A
Publication Date:
March 21, 2013
Filing Date:
November 29, 2007
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
H01L21/304; B24B37/00
Domestic Patent References:
| JP2003234315A | ||||
| JP2007112722A | ||||
| JP49127968A | ||||
| JP2001288455A |
Attorney, Agent or Firm:
Atsushi Nakajima
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda
Kato Kazunori
Katsuichi Nishimoto
Hiroshi Fukuda