POLISHING METHOD AND DEVICE FOR EDGE PORTION OF WORKPIECE

Title:

POLISHING METHOD AND DEVICE FOR EDGE PORTION OF WORKPIECE

Document Type and Number:

Japanese Patent JP2001328051

Kind Code:

A

Abstract:

To highly efficiently and precisely polish an edge portion of a workpiece.

A polishing member 6 is provided adjacent to a workpiece holding member 2 rotatably holding the workpiece 20. The polishing member 6 comprises a feed drum 8, a polishing belt 9 winding around the feed drum 8, a winding drum 10 for the polishing belt 9 fed from the feed drum 8, and a pair of guide members 11 and 11 guiding the polishing belt 9. The polishing member 6 is moved in the direction of the workpiece holding member 2, the edge portion 20a of the workpiece 20 is positioned in a part of the polishing belt 9 positioned between the pair of guide members 11 and 11, and a chamfer portion 20b of the edge portion 20a of the workpiece 20 is press contacted with the part of the polishing belt 9 positioned on the inclined face 11a of each guide member 11. The workpiece 20 is rotated integrally with the workpiece holding member 2 so that the chamfered part 20b of the edge portion 20a of the workpiece 20 is polished.

Inventors:

HAKOMORI SHUNJI
SHIMIZU TOSHIKUNI
ASAI TORU
AIZAWA TOMOHIRO

Application Number:

JP2000149883A

Publication Date:

November 27, 2001

Filing Date:

May 22, 2000

Export Citation:

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Assignee:

SPEEDFAM CO LTD

International Classes:

B24B9/00; B24B21/00; H01L21/304; (IPC1-7): B24B9/00; B24B21/00; H01L21/304

Attorney, Agent or Firm:

Mikio Nakabayashi

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