Title:
POLISHING METHOD USING AN ULTRASONIC WAVE
Document Type and Number:
Japanese Patent JPS51120491
Kind Code:
A
Abstract:
PURPOSE: To make it possible to completely remove surface oxides without deformation and breakage of minute parts.
Inventors:
HIRATSUKA TOSHIO
YONETSUKA MASAYASU
YONETSUKA MASAYASU
Application Number:
JP4620675A
Publication Date:
October 21, 1976
Filing Date:
April 15, 1975
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
B24B31/10; B24B31/00; (IPC1-7): B24B31/00