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Patent Searching and Data


Title:
POLISHING METHOD
Document Type and Number:
Japanese Patent JPH10180621
Kind Code:
A
Abstract:

To provide a polishing method capable of preventing its polishing yield from lowering by the deformation of a stationary plate in the polishing due to a change in temperature.

A polishing method holds constant the temperature of free grinding grains used in correcting an upper stationary plate and a lower one constituting a double polishing device, and also the temperature of free grinding grains used in matting both surfaces of a crystal substrate simultaneously with the device. Concretely, the temperature of free grinding grains is held constant by circulating cooling water in a vessel storing therein the free grinding grains to be used under circulation or by making the free grinding grains pass through a cooler prior to the feed thereof to the device.


Inventors:
TANAKA SHIGEKI
Application Number:
JP34157696A
Publication Date:
July 07, 1998
Filing Date:
December 20, 1996
Export Citation:
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Assignee:
SUMITOMO METAL MINING CO
International Classes:
B24B57/02; B24B1/00; B24B37/015; (IPC1-7): B24B37/00; B24B1/00; B24B57/02