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Patent Searching and Data


Title:
POLISHING PAD AND POLISHING MACHINE
Document Type and Number:
Japanese Patent JP2007007771
Kind Code:
A
Abstract:

To provide a polishing pad and a polishing machine using the polishing pad, polishing a member to be polished having a polygonal surface to be polished without the risk of damaging the outer peripheral part, and maintaining the polishing efficiency equal to that of a polishing pad having a grid-like polishing groove.

This polishing pad 10 includes a grid-like groove 11 (11a, 11b) provided on the contact surface with the surface to be polished, and the respective line grooves constituting the grid-like groove are formed by a curve. The polishing machine includes: a polishing platen where a flat plate-like member (w) to be polished is placed; and a pressure platen disposed opposite to the polishing platen to press the member to be polished to the polishing platen side, and a polishing pad is stuck to at least the surface of the polishing platen.


Inventors:
SUZUKI TATSUYUKI
MOGI AKIO
Application Number:
JP2005191101A
Publication Date:
January 18, 2007
Filing Date:
June 30, 2005
Export Citation:
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Assignee:
MITSUBISHI MATERIALS TECHNO CO
International Classes:
B24B37/20
Domestic Patent References:
JP2002020055A2002-01-23
JP2002028849A2002-01-29
Attorney, Agent or Firm:
Chiharu Shimizu