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Patent Searching and Data


Title:
POLISHING TOOL, POLISHING DEVICE, AND POLISHING PRECESS
Document Type and Number:
Japanese Patent JP2004098267
Kind Code:
A
Abstract:

To control the shape of an elastic head at a polishing tool or the like at a real time during processing.

For the elastic tool body section of the polishing tool, both ends of a cylindrical elastic thin film head section 1 is hermetically sealed and retained by a pair of retention plates 2, the elastic thin film head section 1 is maintained in a predetermined external shape by the controllable pressure of a gas supplied from the outside of the device through a gas supply channel 11a provided inside a rotation shaft 11 which is a main tool spindle rotated by a motor 16. The external shape of the elastic thin film head section 1 can be changed in processing according to the local radius of curvature at a lens to be processed W1 by adjusting the distance between the two retention plates 2, 3 by a hydraulic cylinder 19.


Inventors:
ITO KAZUHIKO
Application Number:
JP2002267549A
Publication Date:
April 02, 2004
Filing Date:
September 13, 2002
Export Citation:
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Assignee:
CANON KK
International Classes:
B24B13/01; B24B29/00; B24B37/00; (IPC1-7): B24B29/00; B24B37/00
Attorney, Agent or Firm:
Yoshiro Sakamoto