Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
POLYIMIDE-BASED PRECURSOR COMPOSITION, ITS PRODUCTION AND SEMICONDUCTOR DEVICE AND OPTICAL APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JPH07247425
Kind Code:
A
Abstract:

PURPOSE: To obtain the subject composition, containing an organozirconium compound in a polyimide-based precursor, excellent not only in heat and solvent resistances but also in adhesion to a substrate and suitable as an insulating film for semiconductor devices, a protective film, a material, etc., for optical transmission lines.

CONSTITUTION: This precursor composition contains (B) an organozirconium compound such as tributoxyacetylacetonatozirconium in (A) a polyimide-based precursor, e.g. a polyimide-based precursor, obtained by reacting a tetracarboxylic dianhydride, e.g. (trifluoromethyl)pyromellitic dianhydride with a diamine such as 4,4'-diaminodiphenyl ether in a polar solvent and having 1-30 imidation ratio. Furthermore, the content of the component (B) is preferably 0.005-5wt.% based on the component (A).


Inventors:
YAMAGISHI TOMOAKI
SASAKI HAN
Application Number:
JP3964494A
Publication Date:
September 26, 1995
Filing Date:
March 10, 1994
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
HITACHI CHEMICAL CO LTD
International Classes:
C08K5/56; C08L79/04; C08L79/08; G02B6/12; H01L21/312; (IPC1-7): C08L79/04; C08K5/56; H01L21/312
Attorney, Agent or Firm:
Kunihiko Wakabayashi