Title:
POLYMER HUMIDITY SENSITIVE MATERIAL
Document Type and Number:
Japanese Patent JP2002174609
Kind Code:
A
Abstract:
To provide a highly sensitive humidity sensor having excellent environmental resistance usable in a wide humidity range.
As the humidity sensitive material, a polymer resin thin film made of a low dielectric polybenzoxazole resin having polyhydroxyamide including an unclosed ring part is used.
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Inventors:
FUKUNISHI SHUZO
HIGASHIDA NOBUHIRO
HIGASHIDA NOBUHIRO
Application Number:
JP2000373848A
Publication Date:
June 21, 2002
Filing Date:
December 08, 2000
Export Citation:
Assignee:
SUMITOMO BAKELITE CO
International Classes:
G01N27/12; C08G73/22; (IPC1-7): G01N27/12; C08G73/22
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