Title:
POSITION-CONTROLLING DEVICE
Document Type and Number:
Japanese Patent JP3937206
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To suppress the increase in the intrusion of heat from the outside by installing a mirror for showing a sample and a sensor in the visual field of a heat-insulating mechanism and the opening of a chamber.
SOLUTION: A cooling head 30a for sensor has a sensor retention part and is used to retain and cool a sensor 50, and a heat shut-off plate 31 is used to prevent radiation heat being propagated from the outside to the sensor 50 and a sample 60 and is thermally connected to the cooling head 30a and then is retained in a vacuum chamber 10 using a post 11. An optical microscope 40 is used to observe the sensor 50 and a sample 60 from the outside of the vacuum chamber 10, and observation windows 12a and 32a are provided on the side surface of the chamber 10 and on the side surface of the heat shut-off plate 31, respectively, to perform observation from the Y-axis direction of a three-axis scanning stage. Also, a window 13 for lighting and a hole 33 for applying light is provided for observation, and observation is made directly by the microscope 40 when observing the sensor 50 and the sample 60 from the Y-axis direction of the three-axis scanning state. In this case, a mirror 70 is installed at the cooling head 30a for sensor for observing an image appearing on the mirror 70 by the microscope 40.
Inventors:
Odawara Seikei
Application Number:
JP26047699A
Publication Date:
June 27, 2007
Filing Date:
September 14, 1999
Export Citation:
Assignee:
SII Nanotechnology Co., Ltd.
International Classes:
G01Q10/02; G01Q30/08; G01Q30/10; G01Q30/20; (IPC1-7): G01N13/10
Domestic Patent References:
| JP5312561A | ||||
| JP7311205A | ||||
| JP8248001A | ||||
| JP9119918A | ||||
| JP2000121713A | ||||
| JP3257310A | ||||
| JP4249054A | ||||
| JP7248217A | ||||
| JP8220114A | ||||
| JP10142238A | ||||
| JP10206148A |
Attorney, Agent or Firm:
Yoshiharu Matsushita