Title:
Position gap detecting method
Document Type and Number:
Japanese Patent JP6011138
Kind Code:
B2
Inventors:
Koji Oi
Application Number:
JP2012177175A
Publication Date:
October 19, 2016
Filing Date:
August 09, 2012
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2125256A | ||||
| JP8037148A | ||||
| JP2001265012A | ||||
| JP2007249169A | ||||
| JP2009004601A |
Attorney, Agent or Firm:
Hiromi Fujimasu
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi