Title:
POSITION MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3634275
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a measuring device capable of executing highly precise and stable accuracy guarantee even to the age-based change or the temperature change of the device, while validating existing space accuracy correction, and a device widely used for a three-dimensional measuring device, capable of realizing furthermore accuracy stability, and improving reliability.
SOLUTION: In this position measuring device, a target position in a specific coordinate space relative to a reference plane 4 determined beforehand is measured based on a coordinate system, and an error is corrected. The device is characterized by having a relation change measuring mechanism 18 for measuring whether the relation with the reference plane 4 is changed or not relative to the motion executed by a moving means 8, and being equipped with an error rectification method 20 for correcting additionally the position coordinate corrected by an error correction means 16 based on the quantity of the change of the relation measured by the relation change measuring mechanism 18 when the change is generated.
Inventors:
Ogura Katsuyuki
Masakazu Matsumoto
Sugita Kozo
Masakazu Matsumoto
Sugita Kozo
Application Number:
JP2001060811A
Publication Date:
March 30, 2005
Filing Date:
March 05, 2001
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01C9/00; G01B21/00; G01B21/04; G01B21/22; (IPC1-7): G01B21/00
Domestic Patent References:
| JP7324929A | ||||
| JP8247756A | ||||
| JP63182509A | ||||
| JP61097504A | ||||
| JP2004502951A |
Foreign References:
| US4663852 | ||||
| DE19830646A1 | ||||
| EP0687890A2 |
Attorney, Agent or Firm:
Yuji Iwahashi