Title:
POSITIONING APPARATUS AND ITS CONTROLLING METHOD
Document Type and Number:
Japanese Patent JP2006287121
Kind Code:
A
Abstract:
To perform safely and securely the restart of a stage after its driving is stopped because the moveable stage is beyond a predetermined moving range.
The positioning apparatus is equipped with a stage having a stationary part and a movable part, a driving means which drives the stage according to the position controlling command of the stage, a position detecting means which detects the stage beyond the predetermined moving range, a drive controlling means which stops the stage being driven by the driving means according to the result detected by the detecting means, and a releasing means which releases the stoppage of the stage driving controlled by the drive controlling means when the stage restarts.
Inventors:
SHIBATA YUGO
Application Number:
JP2005107745A
Publication Date:
October 19, 2006
Filing Date:
April 04, 2005
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/027; G03F7/20; H01L21/68
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Previous Patent: LIGHT EMITTING ELEMENT AND ITS MANUFACTURING METHOD
Next Patent: PLANE STAGE DEVICE AND EXPOSURE DEVICE
Next Patent: PLANE STAGE DEVICE AND EXPOSURE DEVICE