Title:
POSITIONING DEVICE IN ALIGNER
Document Type and Number:
Japanese Patent JP2674900
Kind Code:
B2
Abstract:
PURPOSE: To recognize a position and to enable accurate positioning even if a shape of a mark changes.
CONSTITUTION: A space filter 8a having a window 16 which screens regular reflection light 9 from a mark and transmits scattered light 10, 10a from a step part of marks 6a, 6b and a driver 15 which changes a position of the window 16 are provided. The window 16 is moved to a position wherein maximum light intensity can be acquired and positions of marks 6a, 6b are recognized.
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Inventors:
Muraoka Yukihiro
Application Number:
JP17083191A
Publication Date:
November 12, 1997
Filing Date:
July 11, 1991
Export Citation:
Assignee:
Yamagata NEC Corporation
International Classes:
G03B27/32; G03F9/00; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03B27/32; G03F9/00
Domestic Patent References:
| JP62237726A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)