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Title:
POSITIONING DEVICE
Document Type and Number:
Japanese Patent JP2003191140
Kind Code:
A
Abstract:

To provide a positioning device capable of enhancing bearing rigidity without making the device to a large size.

The positioning device positions a moving stage 102 supported by a fluid bearing 103 against a base 101 and is provided with a driving magnet 104 adding force so as to move the moving stage to a direction perpendicular to a pressure surface receiving a fluid pressure of the fluid bearing 103; a target member 107 integrally moved to a moving direction with the moving stage and relatively movably supported against the moving stage in the direction perpendicular to the pressure surface; and a detection sensor 106 for detecting a relative position in the direction perpendicular to the pressure surface of the moving stage and the target member. A bearing gap of the moving stage is controlled by adjusting generation force of the driving magnet based on a detection result of the detection sensor.


Inventors:
TAKIZAWA NAOKI
Application Number:
JP2001392636A
Publication Date:
July 08, 2003
Filing Date:
December 25, 2001
Export Citation:
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Assignee:
CANON KK
International Classes:
G12B5/00; B23Q1/00; B23Q1/26; B23Q1/38; B23Q1/56; F16C32/00; (IPC1-7): B23Q1/56; B23Q1/38; F16C32/00; G12B5/00
Attorney, Agent or Firm:
Yasunori Otsuka (3 others)



 
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