Title:
位置決め装置
Document Type and Number:
Japanese Patent JP5160233
Kind Code:
B2
Abstract:
A positioning device of the type described characterised by the incorporation of the puck into a closed circuit gas system from which the puck establishes the flow of fluid to provide the fluid cushion. Typically the positioning device is characterised by the provision of a heat transfer mechanism incorporated in the closed circuit to provide for heat exchange between the heat transfer mechanism and gas flowing around the system. The puck is coupled to a lens and a mask to provide for close following of a surface of a work-piece so as to keep a magnified image of the mask stable; the combination of puck, lens and mask forming a unit counterbalanced by a counterweight acting to provide for adjustment of focus of the laser beam relative to the surface of the work-piece.
Inventors:
Sykes, nail
Application Number:
JP2007544991A
Publication Date:
March 13, 2013
Filing Date:
December 12, 2005
Export Citation:
Assignee:
Oerlikon Solar AG Trupbach
International Classes:
G03F9/02; B23K26/04; B23K26/08; B23K26/14; H01L21/027
Domestic Patent References:
| JP2004349645A | ||||
| JP2001269788A | ||||
| JP3071007A | ||||
| JP53001934U | ||||
| JP2004289126A | ||||
| JP11162831A |
Foreign References:
| US4550241 | ||||
| WO2004087363A1 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa