PURPOSE: To enable stable positioning operations by supporting a sample table rotatably around two axes crossing at right angles to each other, and by detecting the direction of regular reflection of a laser beam on the surface of a sample, which is applied thereto from the reference direction.
CONSTITUTION: A laser beam 17 is applied obliquely from above to the central point on the surface of a sample 1 by a laser oscillator 16, and a light regularly reflected on the surface of the sample is received by a one-dimensional position sensor 18. The reception position signal output thereof is inputted to a control device 8 through an amplifier 19 and an analog operator 20. The control device 8 drives a pulse motor 15-1 by an amount corresponding to the modification of a height, thus moving a height adjusting mechanism 15 by the amount.
FUKUSHIMA TSUNEMI
TSUKADA KAZUYA
HITACHI ENG CO LTD
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