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Patent Searching and Data


Title:
POSITIONING TABLE DEVICE
Document Type and Number:
Japanese Patent JPH07125838
Kind Code:
A
Abstract:

PURPOSE: To position and hold a holder means for a base means at a high speed and with high precision, with the simple constitution.

CONSTITUTION: A holder means 13 on which a prescribed positioning objective body is placed asd a part or the whele 13A and 13B of a base means 11 on which the holder means 13 is placed are made of the magnetic material, and a rolling means 12 made of the magnetic material is nipped between the base means 11 and the holder means 13, and the holder means 13 can be positioned through the shift at high speed and with high precision for the base means 11. Further, if necessary, a magnetic attractive force is generated between the holder means 13 and the base means 11 through the rolling means 12 by an electromagnetic means, and the position of the holder means 13 which is positioning-performed can be held with high precision.


Inventors:
HANAZAKI TETSUTSUGU
Application Number:
JP16956993A
Publication Date:
May 16, 1995
Filing Date:
June 15, 1993
Export Citation:
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Assignee:
NIKON CORP
International Classes:
B23Q3/18; B23Q1/00; B23Q1/28; B23Q1/44; B23Q1/56; B65G47/88; H01L21/027; H01L21/30; H01L21/68; H05K13/04; (IPC1-7): B65G47/88; B23Q1/56; H01L21/027; H01L21/68; H05K13/04
Attorney, Agent or Firm:
Kei Tanabe