Title:
ポジ型感光性樹脂組成物、パターン硬化膜の製造方法及び電子部品
Document Type and Number:
Japanese Patent JP5504735
Kind Code:
B2
Inventors:
Masashi Kotani
Application Number:
JP2009179059A
Publication Date:
May 28, 2014
Filing Date:
July 31, 2009
Export Citation:
Assignee:
Hitachi Chemical DuPont Micro Systems Co., Ltd.
International Classes:
G03F7/023; C08G69/32; G03F7/004; H01L21/027
Domestic Patent References:
| JP2000241973A | ||||
| JP2006251477A |
Attorney, Agent or Firm:
Kihei Watanabe
Yuko Tanaka
Yuko Tanaka